Re-Defining Historical Bin Sizing of MFCs
Historically, customers are forced to fit their process gas needs into available bin sizes (from
9 to 13) with our competitors.
While the GPES iMFC offers a wider range than any of our competitors’ equivalent bins, the GPES
design has an added inherent advantage to further reduce your spares inventory using its on-tool
calibration features (for all models)!
GPES has only 4 Mechanical Configurations:
| Mech. cfg. |
N2 eq Max Flow |
| U |
30 sccm |
| L |
300 sccm |
| M |
$10000 sccm |
| H |
$60000 sccm |
Now, as a gas panel integrator, or system designer, you can take any of the above 4
configurations from your inventory, get a sizing seal/flow restrictor for the gas you want to
flow on that channel and, using the GPES in-situ calibration metrology (i100/i200) or the
on-tool
metrology match calibration feature (i050), you can program the MFC to match and flow within
1%
accuracy from 5 to 100% of its range at the touch of a button!
For example, if your process had all gases in the N2 equivalent full scale between 301 sccm to
10,000 sccm, then you could build your entire gas delivery system with ONE SINGLE GPES hardware
configuration, M, and each of your process gas needs will be optimized such that you can get
5-100% of process gas range with 1% accuracy IN ACTUAL GAS!
Now, as a gas panel integrator, or system designer, you can take any of the above 4
configurations from your inventory, get a sizing seal/flow restrictor for the gas you want to
flow on that channel and, using the in-situ calibration metrology (i100/i200) or the on-tool
metrology match calibration feature (i050), you can program the MFC to match and flow within 1%
accuracy from 5 to 100% of its range at the touch of a button!
Versatile Electrical Connection Options:
DeviceNet / Analog / RS485 combined
or
EtherCAT / Analog / RS485 combined (add DNET adapter to meet all your fab tool electrical
connection requirements)
