High-purity is generally referred to a fluid delivery system where the impurities are in the part-per-billion range. Most Semiconductor, Solar, Bio-Tech industries need very clean and pure manufacturing environments.

APIMS stands for atmospheric pressure ionization mass spectrometry, and is a very effective way of checking for impurities in gasses such as Nitrogen, Hydrogen, Oxygen etc.

MFC or mass flow controllers is a device that measures and controls flow in gasses and liquids. MFC measurement is considered volumetric, and in an ideal world, since pressure and temperature would be constant, the measurement indirectly relates to mass measurement.

A thermal mass flow controller operates by introducing thermal sensors into the flowing stream and measuring the associated temperature change between these inputs to control output. This approach effects output stability (prone to drift), especially at low flows, requiring frequent recalibration and subsequent process down-time.

A pressure-based mass flow controller operates by measuring the pressure drop across a flow restrictor to control output. This approach shows accurate and repeatable output stability (immune to drift), especially at low flows, ensuring maximum process up-time. This is the design principle behind FDS products; iMFCandeMFC.

A MFC that is independent and compensates for upstream pressure fluctuations is a pressure insensitive device. We represent Celerity Inc. which has the largest installed base of pressure insensitive devices in the world.

Particles are among the most challenging impurities in a semiconductor, LCD or solar process. Particles make an unevenly distributed impurity, and generally are dislodged from the fluid delivery medium walls upon impact or shear. Since the nature and timing of this dislodging is random, your fluid delivery system needs to have a proper design to ensure that the particles will be captured at all times and will not reach your manufacturing/process area. FDS offers help in optimizing such design.