Products
With the advent of digital technology in flow measurement, devices have gone from accuracy expressed as a function of full-scale measurement to now accuracy measured as a function of set-point. Simply translated, it cuts gas waste and lowering your overall cost of ownership - less material usage, less abatement costs. The attached graph gives you an idea on how the new generation flow control products enable your technologies for better performance.
FDS, through its advanced technologies and leadership position in the field of flow control, offers you a range of Mass Flow Control products that are perfectly suited for your application.
i MFC50/51
Flow Devices Systeme presents the iMFC Mass Flow Control System. The i MFC50/51 is a pressure-based mass flow control system that will maintain a constant pressure to an orifice with an internal pressure regulator (while reducing cost through elimination of external pressure regulator).
FEATURES
- Multi-functioned Flow Control System
Digital Flow Control System
Pressure Regulator
Pressure Transducer
Temperature Sensor
Built-in Inline Filter (i051 only)
- Positive Valve Shutoff
Exceptional valve leak-by performance (specified at 30 psia inlet pressure w/ vacuum downstream)
- Total Inlet Pressure Immunity (IPI)
Delivers continuous, precise flow
Upstream pressure regulator eliminated
- True Gas Independence
Configurable to any SEMI Gas
- Auto-correction
Ensures long term, precise flow delivery
Servicing required notifications
- High Speed Startup
Typically, less than 0.3s to flow
- Diagnostics & Alarms
Valve Leak-by & Temperature Alarm
Power Surge/Sag Alarm
i MFC100/200
Flow Devices Systeme presents the iMFC Mass Flow Control System. The iMFC is a pressure-based mass flow control system that will maintain a constant pressure to an orifice with an internal pressure regulator (while reducing cost through elimination of external pressure regulator). The device also incorporates a pressure rate-of decay system with in the controller, (flow varification) which eliminates sensor drift providing for reliable, accurate performance for an extended lifetime of the product.
FEATURES
- Multi-functioned Flow Control System
Digital Flow Control System
Pressure Regulator
Pressure Transducer
Temperature Sensor
Built-in Inline Filter (i101/i201 only)
- Positive Valve Shutoff
Exceptional valve leak-by performance
- Total Inlet Pressure Immunity (IPI)
Delivers continuous, precise flow
Upstream pressure regulator eliminated
- True Gas Independence
Self-Calibrating
Configurable to any SEMI Gas
No need for factory re-calibration
- Flow Verification
On-board system
Replaces ROR chamber
Allows for user-configurable on-tool metrology system
- Auto-correction
Ensures long term, precise flow delivery
Servicing required notifications
- High Speed Startup
Typically, less than 0.3s to flow
- Diagnostics & Alarms
Autocorrection at %SP
Valve Leak-by & Temperature Alarm
Power Surge/Sag Alarm
Future of Flow Control - Today
Automatic Flow Verification Performance
ROD Performance
Re-Defining Historical Bin Sizing of MFCs
Historically, customers are forced to fit their process gas needs into available bin sizes (from 9 to 13) with our competitors.
While the FDS iMFC offers a wider range than any of our competitors’ equivalent bins, the FDS design has an added inherent advantage to further reduce your spares inventory using its on-tool calibration features (for all models)!
FDS has only 4 Mechanical Configurations:
| Mech. cfg. | N2 eq Max Flow |
|---|---|
| U | 30 sccm |
| L | 300 sccm |
| M | $10000 sccm |
| H | $60000 sccm |
Now, as a gas panel integrator, or system designer, you can take any of the above 4 configurations from your inventory, get a sizing seal/flow restrictor for the gas you want to flow on that channel and, using the FDS in-situ calibration metrology (i100/i200) or the on-tool metrology match calibration feature (i050), you can program the MFC to match and flow within 1% accuracy from 5 to 100% of its range at the touch of a button!
For example, if your process had all gases in the N2 equivalent full scale between 301 sccm to 10,000 sccm, then you could build your entire gas delivery system with ONE SINGLE FDS hardware configuration, M, and each of your process gas needs will be optimized such that you can get 5-100% of process gas range with 1% accuracy IN ACTUAL GAS!
Versatile Electrical Connection Options:
DeviceNet / Analog / RS485 combined
-or-
EtherCAT / Analog / RS485 combined (add DNET adapter to meet all your fab tool electrical connection requirements)